Tom Oomen, Robbert van Herpen, Sander Quist, Marc van de Wal, Okko H. Bosgra, Maarten Steinbuch. Next-generation wafer stage motion control: Connecting system identification and robust control. In American Control Conference, ACC 2012, Montreal, QC, Canada, June 27-29, 2012. pages 2455-2460, IEEE, 2012. [doi]
Abstract is missing.