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FEM-based method to determine mechanical stress evolution during process flow in microelectronics, application to stress-voiding

S. Orain, J.-C. Barbé, X. Federspiel, P. Legallo, H. Jaouen. FEM-based method to determine mechanical stress evolution during process flow in microelectronics, application to stress-voiding. Microelectronics Reliability, 47(2-3):295-301, 2007. [doi]

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S. Orain

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J.-C. Barbé

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X. Federspiel

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P. Legallo

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H. Jaouen

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