S. Orain, J.-C. Barbé, X. Federspiel, P. Legallo, H. Jaouen. FEM-based method to determine mechanical stress evolution during process flow in microelectronics, application to stress-voiding. Microelectronics Reliability, 47(2-3):295-301, 2007. [doi]
@article{OrainBFLJ07,
title = {FEM-based method to determine mechanical stress evolution during process flow in microelectronics, application to stress-voiding},
author = {S. Orain and J.-C. Barbé and X. Federspiel and P. Legallo and H. Jaouen},
year = {2007},
doi = {10.1016/j.microrel.2006.09.018},
url = {http://dx.doi.org/10.1016/j.microrel.2006.09.018},
tags = {data-flow, C++},
researchr = {https://researchr.org/publication/OrainBFLJ07},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {47},
number = {2-3},
pages = {295-301},
}