Directed Self-Assembly Based Cut Mask Optimization for Unidirectional Design

Jiaojiao Ou, Bei Yu, Jhih-Rong Gao, David Z. Pan, Moshe Preil, Azat Latypov. Directed Self-Assembly Based Cut Mask Optimization for Unidirectional Design. In Alex K. Jones, Hai Helen Li, Ayse Kivilcim Coskun, Martin Margala, editors, Proceedings of the 25th edition on Great Lakes Symposium on VLSI, GLVLSI 2015, Pittsburgh, PA, USA, May 20 - 22, 2015. pages 83-86, ACM, 2015. [doi]

Abstract

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