DSAR: DSA aware Routing with Simultaneous DSA Guiding Pattern and Double Patterning Assignment

Jiaojiao Ou, Bei Yu, Xiaoqing Xu, Joydeep Mitra, Yibo Lin, David Z. Pan. DSAR: DSA aware Routing with Simultaneous DSA Guiding Pattern and Double Patterning Assignment. In Mustafa Ozdal, Chris Chu, editors, Proceedings of the 2017 ACM on International Symposium on Physical Design, ISDP 2017, Portland, OR, USA, March 19-22, 2017. pages 91-98, ACM, 2017. [doi]

Abstract

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