K. Ozaki, H. Sekiguchi, S. Wakana, Y. Goto, Y. Umehara, J. Matsumoto. Novel Optical Probing System with Submicron Spatial Resolution for Internal Diagnosis of VLSI Circuits. In Proceedings IEEE International Test Conference 1996, Test and Design Validity, Washington, DC, USA, October 20-25, 1996. pages 269-275, IEEE Computer Society, 1996.
Abstract is missing.