Application and Product-Volume-Specific Customization of BEOL Metal Pitch

Samuel N. Pagliarini, Mehmet Meric Isgenc, Mayler G. A. Martins, Lawrence T. Pileggi. Application and Product-Volume-Specific Customization of BEOL Metal Pitch. IEEE Trans. VLSI Syst., 26(9):1627-1636, 2018. [doi]

@article{PagliariniIMP18,
  title = {Application and Product-Volume-Specific Customization of BEOL Metal Pitch},
  author = {Samuel N. Pagliarini and Mehmet Meric Isgenc and Mayler G. A. Martins and Lawrence T. Pileggi},
  year = {2018},
  doi = {10.1109/TVLSI.2018.2828387},
  url = {http://doi.ieeecomputersociety.org/10.1109/TVLSI.2018.2828387},
  researchr = {https://researchr.org/publication/PagliariniIMP18},
  cites = {0},
  citedby = {0},
  journal = {IEEE Trans. VLSI Syst.},
  volume = {26},
  number = {9},
  pages = {1627-1636},
}