Application and Product-Volume-Specific Customization of BEOL Metal Pitch

Samuel N. Pagliarini, Mehmet Meric Isgenc, Mayler G. A. Martins, Lawrence T. Pileggi. Application and Product-Volume-Specific Customization of BEOL Metal Pitch. IEEE Trans. VLSI Syst., 26(9):1627-1636, 2018. [doi]

Abstract

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