SOI digital accelerometer based on pull-in time configuration - researchr publication authors

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Lukasz S. Pakula, Vijayekumar Rajaraman, Patrick J. French. SOI digital accelerometer based on pull-in time configuration. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 628-631, IEEE, 2009. [doi]

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