Lukasz S. Pakula, Vijayekumar Rajaraman, Patrick J. French. SOI digital accelerometer based on pull-in time configuration. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 628-631, IEEE, 2009. [doi]
Abstract is missing.