ePCM reliability improvement through active material carbon implantation

Elisabetta Palumbo, Alessandro Motta, Elisa Petroni, Daniele Gallinari, Annalisa Gilardini, Amos Galbiati, Massimo Borghi, Roberto Annunziata, Andrea Redaelli. ePCM reliability improvement through active material carbon implantation. In 53rd IEEE European Solid-State Device Research Conference, ESSDERC 2023, Lisbon, Portugal, September 11-14, 2023. pages 29-32, IEEE, 2023. [doi]

Abstract

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