Abbas Panahi, Ebrahim Ghafar-Zadeh, Sebastian Magierowski, Mohammad Hossein Sabour. A Non-Invasive Characterization Method for MEMS Based Devices. In IEEE 61st International Midwest Symposium on Circuits and Systems, MWSCAS 2018, Windsor, ON, Canada, August 5-8, 2018. pages 1094-1097, IEEE, 2018. [doi]
Abstract is missing.