Self-Heating characterization and modeling of 5nm technology node FinFETs

Shivendra S. Parihar, Jun Z. Huang, Weike Wang, Kimihiko Imura, Yogesh Singh Chauhan. Self-Heating characterization and modeling of 5nm technology node FinFETs. In Device Research Conference, DRC 2022, Columbus, OH, USA, June 26-29, 2022. pages 1-2, IEEE, 2022. [doi]

Abstract

Abstract is missing.