Doping-Optimized Back-illuminated Single-Photon Avalanche Diode in Stacked 40 nm CIS Technology Achieving 60% PDP at 905 nm

Eunsung Park, Won Yong Ha, Doyoon Eom, Dae-Hwan Ahn, Hyuk An, Suhyun Yi, Kyung-Do Kim, Jongchae Kim, Woo-Young Choi, Myung-Jae Lee. Doping-Optimized Back-illuminated Single-Photon Avalanche Diode in Stacked 40 nm CIS Technology Achieving 60% PDP at 905 nm. In 2023 IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits), Kyoto, Japan, June 11-16, 2023. pages 1-2, IEEE, 2023. [doi]

Authors

Eunsung Park

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Won Yong Ha

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Doyoon Eom

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Dae-Hwan Ahn

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Hyuk An

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Suhyun Yi

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Kyung-Do Kim

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Jongchae Kim

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Woo-Young Choi

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Myung-Jae Lee

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