Performance bounds for hybrid flow lines: Fundamental behavior, practical features and application to linear cluster tools

Kyungsu Park, James R. Morrison. Performance bounds for hybrid flow lines: Fundamental behavior, practical features and application to linear cluster tools. In 2012 IEEE International Conference on Automation Science and Engineering, CASE 2012, Seoul, Korea (South), August 20-24, 2012. pages 371-376, IEEE, 2012. [doi]

Abstract

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