Effect of double-patterning and double-etching on the line-edge-roughness of multi-gate bulk MOSFETs

In Jun Park, Changhwan Shin. Effect of double-patterning and double-etching on the line-edge-roughness of multi-gate bulk MOSFETs. IEICE Electronic Express, 10(5):20130108, 2013. [doi]

Abstract

Abstract is missing.