Deep Kishore Parsediya, Jawar Singh, Pavan Kumar Kankar. Modeling and simulation of variable thickness based stepped MEMS cantilever designs for biosensing and pull-in voltage optimization. In 18th International Symposium on VLSI Design and Test, VDAT 2014, Coimbatore, India, July 16-18, 2014. pages 1-2, IEEE, 2014. [doi]
Abstract is missing.