Conduction mechanisms and an evidence for phonon-assisted conduction process in thin high-k Hf::x::Ti::y::Si::z::O films - researchr publication

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Albena Paskaleva, Anton J. Bauer, Martin Lemberger. Conduction mechanisms and an evidence for phonon-assisted conduction process in thin high-k Hf::x::Ti::y::Si::z::O films. Microelectronics Reliability, 45(7-8):1124-1133, 2005. [doi]

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