Omari Paul, Sakib Abrar, Richard Mu, Riadul Islam, Manar D. Samad. Deep Image Segmentation for Defect Detection in Photo-lithography Fabrication. In 24th International Symposium on Quality Electronic Design, ISQED 2023, San Francisco, CA, USA, April 5-7, 2023. pages 1-7, IEEE, 2023. [doi]
@inproceedings{PaulAMIS23,
title = {Deep Image Segmentation for Defect Detection in Photo-lithography Fabrication},
author = {Omari Paul and Sakib Abrar and Richard Mu and Riadul Islam and Manar D. Samad},
year = {2023},
doi = {10.1109/ISQED57927.2023.10129372},
url = {https://doi.org/10.1109/ISQED57927.2023.10129372},
researchr = {https://researchr.org/publication/PaulAMIS23},
cites = {0},
citedby = {0},
pages = {1-7},
booktitle = {24th International Symposium on Quality Electronic Design, ISQED 2023, San Francisco, CA, USA, April 5-7, 2023},
publisher = {IEEE},
isbn = {979-8-3503-3475-3},
}