Deep Image Segmentation for Defect Detection in Photo-lithography Fabrication

Omari Paul, Sakib Abrar, Richard Mu, Riadul Islam, Manar D. Samad. Deep Image Segmentation for Defect Detection in Photo-lithography Fabrication. In 24th International Symposium on Quality Electronic Design, ISQED 2023, San Francisco, CA, USA, April 5-7, 2023. pages 1-7, IEEE, 2023. [doi]

Abstract

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