Contact and junction engineering in bulk FinFET technology for improved ESD/latch-up performance with design trade-offs and its implications on hot carrier reliability

Milova Paul, B. Sampath Kumar, Harald Gossner, Mayank Shrivastava. Contact and junction engineering in bulk FinFET technology for improved ESD/latch-up performance with design trade-offs and its implications on hot carrier reliability. In IEEE International Reliability Physics Symposium, IRPS 2018, Burlingame, CA, USA, March 11-15, 2018. pages 3, IEEE, 2018. [doi]

Authors

Milova Paul

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B. Sampath Kumar

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Harald Gossner

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Mayank Shrivastava

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