O. Varela Pedreira, Michele Stucchi, A. Gupta, V. Vega Gonzalez, M. van der Veen, S. Lariviere, C. J. Wilson, Zsolt Tokei, K. Croes imec. Metal reliability mechanisms in Ruthenium interconnects. In 2020 IEEE International Reliability Physics Symposium, IRPS 2020, Dallas, TX, USA, April 28 - May 30, 2020. pages 1-7, IEEE, 2020. [doi]
Abstract is missing.