Yimai Peng, Seokhyeon Jeong, Kyojin Choo, Yejoong Kim, Li-Yu Chen, Rohit Rothe, Li Xu 0006, Ilya Gurin, Omid Oliaei, Vadim Tsinker, Stephen Bart, Peter Hartwell, David T. Blaauw, Dennis Sylvester. A 184nW, 121µg/√Hz Noise Floor Triaxial MEMS Accelerometer with Integrated CMOS Readout Circuit and Variation-Compensated High Voltage MEMS Biasing. In IEEE Symposium on VLSI Technology and Circuits (VLSI Technology and Circuits 2022), Honolulu, HI, USA, June 12-17, 2022. pages 84-85, IEEE, 2022. [doi]
Abstract is missing.