Scratch of submicron grooves on aluminum film with AFM diamond tip

Ping Peng, Tielin Shi, Guanglan Liao, Zirong Tang, Chang Liu. Scratch of submicron grooves on aluminum film with AFM diamond tip. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 983-986, IEEE, 2009. [doi]

Abstract

Abstract is missing.