Chunrong Peng, Shanhong Xia. A novel micro-electrostatic field sensor based on parallel-plate resonator. In 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, IEEE-NEMS 2009, Shenzhen, China, January 5-8, 2009. pages 1092-1095, IEEE, 2009. [doi]
Abstract is missing.