An Analytical Model of Transient Response of MEMS under High-G shock for Reliability Assessment

Tianfang Peng, Zheng You. An Analytical Model of Transient Response of MEMS under High-G shock for Reliability Assessment. In IEEE International Reliability Physics Symposium, IRPS 2022, Dallas, TX, USA, March 27-31, 2022. pages 41-1, IEEE, 2022. [doi]

Abstract

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