J. Pétry, Wilfried Vandervorst, L. Pantisano, Robin Degraeve. On the data interpretation of the C-AFM measurements in the characterization of thin insulating layers. Microelectronics Reliability, 45(5-6):815-818, 2005. [doi]
@article{PetryVPD05,
title = {On the data interpretation of the C-AFM measurements in the characterization of thin insulating layers},
author = {J. Pétry and Wilfried Vandervorst and L. Pantisano and Robin Degraeve},
year = {2005},
doi = {10.1016/j.microrel.2004.11.041},
url = {http://dx.doi.org/10.1016/j.microrel.2004.11.041},
tags = {C++},
researchr = {https://researchr.org/publication/PetryVPD05},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {45},
number = {5-6},
pages = {815-818},
}