Thierry Pinguet, Scott Denton, Steffen Gloeckner, Michael Mack, Gianlorenzo Masini, Attila Mekis, Simon Pang, Mark Peterson, Subal Sahni, Peter De Dobbelaere. High-Volume Manufacturing Platform for Silicon Photonics. Proceedings of the IEEE, 106(12):2281-2290, 2018. [doi]
Abstract is missing.