Design, modeling, and characterization of a MEMS micro-gripper with an integrated electrothermal force sensor

Busara Piriyanont, S. O. Reza Moheimani. Design, modeling, and characterization of a MEMS micro-gripper with an integrated electrothermal force sensor. In 2013 IEEE/ASME International Conference on Advanced Intelligent Mechatronics, Wollongong, Australia, July 9-12, 2013. pages 348-353, IEEE, 2013. [doi]

Abstract

Abstract is missing.