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Travel range extension of a MEMS electrostatic microactuator

Damrongrit Piyabongkarn, Yu Sun 0001, Rajesh Rajamani, A. Serdar Sezen, Bradley J. Nelson. Travel range extension of a MEMS electrostatic microactuator. IEEE Trans. Contr. Sys. Techn., 13(1):138-145, 2005. [doi]

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Damrongrit Piyabongkarn

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Yu Sun 0001

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Rajesh Rajamani

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A. Serdar Sezen

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Bradley J. Nelson

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