Travel range extension of a MEMS electrostatic microactuator

Damrongrit Piyabongkarn, Yu Sun 0001, Rajesh Rajamani, A. Serdar Sezen, Bradley J. Nelson. Travel range extension of a MEMS electrostatic microactuator. IEEE Trans. Contr. Sys. Techn., 13(1):138-145, 2005. [doi]

@article{Piyabongkarn0RSN05,
  title = {Travel range extension of a MEMS electrostatic microactuator},
  author = {Damrongrit Piyabongkarn and Yu Sun 0001 and Rajesh Rajamani and A. Serdar Sezen and Bradley J. Nelson},
  year = {2005},
  doi = {10.1109/TCST.2004.838572},
  url = {http://dx.doi.org/10.1109/TCST.2004.838572},
  researchr = {https://researchr.org/publication/Piyabongkarn0RSN05},
  cites = {0},
  citedby = {0},
  journal = {IEEE Trans. Contr. Sys. Techn.},
  volume = {13},
  number = {1},
  pages = {138-145},
}