Nanometer-scale leakage measurements in high vacuum on de-processed high-k capacitors

W. Polspoel, Wilfried Vandervorst, L. Aguilera, M. Porti, M. Nafría, X. Aymerich. Nanometer-scale leakage measurements in high vacuum on de-processed high-k capacitors. Microelectronics Reliability, 48(8-9):1521-1524, 2008. [doi]

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