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SIMS study of silicon oxynitride prepared by oxidation of silicon-rich silicon nitride layer

M.-C. Poon, Y. Gao, T. C. W. Kok, A. M. Myasnikov, Hei Wong. SIMS study of silicon oxynitride prepared by oxidation of silicon-rich silicon nitride layer. Microelectronics Reliability, 41(12):2071-2074, 2001. [doi]

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M.-C. Poon

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Y. Gao

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T. C. W. Kok

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A. M. Myasnikov

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Hei Wong

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