M.-C. Poon, Y. Gao, T. C. W. Kok, A. M. Myasnikov, Hei Wong. SIMS study of silicon oxynitride prepared by oxidation of silicon-rich silicon nitride layer. Microelectronics Reliability, 41(12):2071-2074, 2001. [doi]
@article{PoonGKMW01,
title = {SIMS study of silicon oxynitride prepared by oxidation of silicon-rich silicon nitride layer},
author = {M.-C. Poon and Y. Gao and T. C. W. Kok and A. M. Myasnikov and Hei Wong},
year = {2001},
doi = {10.1016/S0026-2714(01)00216-5},
url = {http://dx.doi.org/10.1016/S0026-2714(01)00216-5},
tags = {C++},
researchr = {https://researchr.org/publication/PoonGKMW01},
cites = {0},
citedby = {0},
journal = {Microelectronics Reliability},
volume = {41},
number = {12},
pages = {2071-2074},
}