Dan O. Popa, Rakesh Murthy, Manoj Mitta, Jeongsik Sin, Harry E. Stephanou. M:::3:::-Modular Multi-Scale Assembly System for MEMS Packaging. In 2006 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2006, October 9-15, 2006, Beijing, China. pages 3712-3717, IEEE, 2006. [doi]
@inproceedings{PopaMMSS06, title = {M:::3:::-Modular Multi-Scale Assembly System for MEMS Packaging}, author = {Dan O. Popa and Rakesh Murthy and Manoj Mitta and Jeongsik Sin and Harry E. Stephanou}, year = {2006}, doi = {10.1109/IROS.2006.281751}, url = {http://dx.doi.org/10.1109/IROS.2006.281751}, tags = {e-science}, researchr = {https://researchr.org/publication/PopaMMSS06}, cites = {0}, citedby = {0}, pages = {3712-3717}, booktitle = {2006 IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2006, October 9-15, 2006, Beijing, China}, publisher = {IEEE}, }