Luciano Prandi, Carlo Caminada, Luca Coronato, Gabriele Cazzaniga, Fabio Biganzoli, Riccardo Antonello, Roberto Oboe. A low-power 3-axis digital-output MEMS gyroscope with single drive and multiplexed angular rate readout. In IEEE International Solid-State Circuits Conference, ISSCC 2011, Digest of Technical Papers, San Francisco, CA, USA, 20-24 February, 2011. pages 104-106, IEEE, 2011. [doi]
Abstract is missing.