Michael Pumphrey, Aylar Abouzarkhanifard, Lihong Zhang, Mohammad Al Janaideh. A Parallel Type Micro-Robotic System for Semi-Conductor Manufacturing Machines: Preliminary Results. In IEEE/ASME International Conference on Advanced Intelligent Mechatronics, AIM 2021, Delft, The Netherlands, July 12-16, 2021. pages 532-539, IEEE, 2021. [doi]
Abstract is missing.