Yonghong Qi, Minghui Zhao, Bo Li, Ziming Ren, Bing Li, Xueyong Wei. A Compact Optical MEMS Pressure Sensor Based on Fabry-Pérot Interference. Sensors, 22(5):1973, 2022. [doi]
@article{QiZLRLW22,
title = {A Compact Optical MEMS Pressure Sensor Based on Fabry-Pérot Interference},
author = {Yonghong Qi and Minghui Zhao and Bo Li and Ziming Ren and Bing Li and Xueyong Wei},
year = {2022},
doi = {10.3390/s22051973},
url = {https://doi.org/10.3390/s22051973},
researchr = {https://researchr.org/publication/QiZLRLW22},
cites = {0},
citedby = {0},
journal = {Sensors},
volume = {22},
number = {5},
pages = {1973},
}