A Compact Optical MEMS Pressure Sensor Based on Fabry-Pérot Interference

Yonghong Qi, Minghui Zhao, Bo Li, Ziming Ren, Bing Li, Xueyong Wei. A Compact Optical MEMS Pressure Sensor Based on Fabry-Pérot Interference. Sensors, 22(5):1973, 2022. [doi]

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