A Compact Optical MEMS Pressure Sensor Based on Fabry-Pérot Interference

Yonghong Qi, Minghui Zhao, Bo Li, Ziming Ren, Bing Li, Xueyong Wei. A Compact Optical MEMS Pressure Sensor Based on Fabry-Pérot Interference. Sensors, 22(5):1973, 2022. [doi]

Abstract

Abstract is missing.