A Virtual Wafer-based Scheduling Method for Dual-arm Cluster Tools with Chamber Cleaning Requirements - researchr publication authors

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Yan Qiao, Jie Li, Yanjun Lu, Siwei Zhang, Naiqi Wu, Bin Liu. A Virtual Wafer-based Scheduling Method for Dual-arm Cluster Tools with Chamber Cleaning Requirements. In IEEE International Conference on Networking, Sensing and Control, ICNSC 2021, Xiamen, China, December 3-5, 2021. pages 1-6, IEEE, 2021. [doi]

This author has not been identified. Look up 'Yan Qiao' in GoogleThis author has not been identified. Look up 'Jie Li' in GoogleThis author has not been identified. Look up 'Yanjun Lu' in GoogleThis author has not been identified. Look up 'Siwei Zhang' in GoogleThis author has not been identified. Look up 'Naiqi Wu' in GoogleThis author has not been identified. Look up 'Bin Liu' in Google

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