Yan Qiao, Jie Li, Yanjun Lu, Siwei Zhang, Naiqi Wu, Bin Liu. A Virtual Wafer-based Scheduling Method for Dual-arm Cluster Tools with Chamber Cleaning Requirements. In IEEE International Conference on Networking, Sensing and Control, ICNSC 2021, Xiamen, China, December 3-5, 2021. pages 1-6, IEEE, 2021. [doi]
@inproceedings{QiaoLLZWL21,
title = {A Virtual Wafer-based Scheduling Method for Dual-arm Cluster Tools with Chamber Cleaning Requirements},
author = {Yan Qiao and Jie Li and Yanjun Lu and Siwei Zhang and Naiqi Wu and Bin Liu},
year = {2021},
doi = {10.1109/ICNSC52481.2021.9702173},
url = {https://doi.org/10.1109/ICNSC52481.2021.9702173},
researchr = {https://researchr.org/publication/QiaoLLZWL21},
cites = {0},
citedby = {0},
pages = {1-6},
booktitle = {IEEE International Conference on Networking, Sensing and Control, ICNSC 2021, Xiamen, China, December 3-5, 2021},
publisher = {IEEE},
isbn = {978-1-6654-4048-6},
}