Yan Qiao, Jie Li, Yanjun Lu, Siwei Zhang, Naiqi Wu, Bin Liu. A Virtual Wafer-based Scheduling Method for Dual-arm Cluster Tools with Chamber Cleaning Requirements. In IEEE International Conference on Networking, Sensing and Control, ICNSC 2021, Xiamen, China, December 3-5, 2021. pages 1-6, IEEE, 2021. [doi]
Abstract is missing.