System-level simulation of a micromachined electrostatically suspended gyroscope

Zhenni Qin, Wenyuan Chen, Feng Cui, Qijun Xiao, Weiping Zhang. System-level simulation of a micromachined electrostatically suspended gyroscope. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 658-661, IEEE, 2010. [doi]

Authors

Zhenni Qin

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Wenyuan Chen

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Feng Cui

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Qijun Xiao

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Weiping Zhang

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