System-level simulation of a micromachined electrostatically suspended gyroscope

Zhenni Qin, Wenyuan Chen, Feng Cui, Qijun Xiao, Weiping Zhang. System-level simulation of a micromachined electrostatically suspended gyroscope. In 5th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2010, Xiamen, China, January 20-23, 2010. pages 658-661, IEEE, 2010. [doi]

References

No references recorded for this publication.

Cited by

No citations of this publication recorded.