An SEM-Based Nanomanipulation System for Multi-Physical Characterization of Single InGaN/GaN Nanowires

Juntian Qu, Renjie Wang, Peng Pan, Linghao Du, Zetian Mi, Yu Sun 0001, Xinyu Liu. An SEM-Based Nanomanipulation System for Multi-Physical Characterization of Single InGaN/GaN Nanowires. In IEEE/RSJ International Conference on Intelligent Robots and Systems, IROS 2020, Las Vegas, NV, USA, October 24, 2020 - January 24, 2021. pages 2866-2871, IEEE, 2020. [doi]

Abstract

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