Real-Time In-situ Monitoring and Characterization of Production Wafer Probing Process

Minh Quach, Kim Harper. Real-Time In-situ Monitoring and Characterization of Production Wafer Probing Process. In Proceedings IEEE International Test Conference 1997, Washington, DC, USA, November 3-5, 1997. pages 802-808, IEEE Computer Society, 1997.

@inproceedings{QuachH97,
  title = {Real-Time In-situ Monitoring and Characterization of Production Wafer Probing Process},
  author = {Minh Quach and Kim Harper},
  year = {1997},
  tags = {process monitoring},
  researchr = {https://researchr.org/publication/QuachH97},
  cites = {0},
  citedby = {0},
  pages = {802-808},
  booktitle = {Proceedings IEEE International Test Conference 1997, Washington, DC, USA, November 3-5, 1997},
  publisher = {IEEE Computer Society},
  isbn = {0-7803-4209-7},
}