Robust Control for Linear Stages in Electronic Manufacturing - researchr publication authors

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Rafael Quintanilla, John T. Wen, Murat Arcak, Joe Frankel, Mark Peeples, Mark Unrath. Robust Control for Linear Stages in Electronic Manufacturing. In American Control Conference, ACC 2007, New York, NY, USA, 9-13 July, 2007. pages 1269-1274, IEEE, 2007. [doi]

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