Multi-Terminal PiezoMOSFET Sensor for Stress Measurements in Silicon

Jose L. Ramirez, Fabiano Fruett. Multi-Terminal PiezoMOSFET Sensor for Stress Measurements in Silicon. In 31st Symposium on Integrated Circuits and Systems Design, SBCCI 2018, Bento Gonçalves, RS, Brazil, August 27-31, 2018. pages 1-6, IEEE, 2018. [doi]

Abstract

Abstract is missing.