Dynamic scheduling of Diffusion Furnace in Semiconductor Manufacturing with real time events - researchr publication authors

researchr

You are not signed in
Sign in
Sign up

M. Vimala Rani, M. Mathirajan. Dynamic scheduling of Diffusion Furnace in Semiconductor Manufacturing with real time events. In 2015 IEEE International Conference on Industrial Engineering and Engineering Management, IEEM 2015, Singapore, December 6-9, 2015. pages 104-108, IEEE, 2015. [doi]

This author has not been identified. Look up 'M. Vimala Rani' in GoogleThis author has not been identified. Look up 'M. Mathirajan' in Google

runs on WebDSL